Publication:

Dry Etching of III-V Layers for Monolithic Optical Device Fabrication on Si

Date

2022-09-20
Meeting abstract
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dc.contributor.authorMilenin, Alexey
dc.contributor.authorYudistira, Didit
dc.contributor.authorDe Koninck, Yannick
dc.contributor.authorBaryshnikova, Marina
dc.contributor.authorKunert, Bernardette
dc.contributor.authorVerheyen, Peter
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorChan, BT
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.imecauthorYudistira, Didit
dc.contributor.imecauthorDe Koninck, Yannick
dc.contributor.imecauthorBaryshnikova, Marina
dc.contributor.imecauthorKunert, Bernardette
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorChan, BT
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.contributor.orcidimecBaryshnikova, Marina::0000-0002-5945-4459
dc.contributor.orcidimecKunert, Bernardette::0000-0002-8986-4109
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecYudistira, Didit::0000-0003-1440-5407
dc.date.accessioned2024-01-16T08:04:23Z
dc.date.available2022-09-26T08:43:00Z
dc.date.available2024-01-16T08:04:23Z
dc.date.issued2022-09-20
dc.identifier.issndo not know
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40515
dc.source.conferenceMNE/PESM
dc.source.conferencedate20.09.2022 - 21.09.2022
dc.source.conferencelocationLeuven, Belgium
dc.source.journalN/A
dc.source.numberofpages2
dc.subject.disciplineMaterials science
dc.subject.keywordsDry Etching of III-V Layers, Monolithic Optical Device Fabrication on Si
dc.title

Dry Etching of III-V Layers for Monolithic Optical Device Fabrication on Si

dc.typeMeeting abstract
dspace.entity.typePublication
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