Publication:
Creep in MEMS. Failures in MEMS due to creep, plasticity and processing-microstructures-temperatures related mechanisms
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2005 since deposited on 2021-10-19
1last month
Acq. date: 2026-02-26
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Statistics
Views
2005 since deposited on 2021-10-19
1last month
Acq. date: 2026-02-26
Citations