Publication:
Creep in MEMS. Failures in MEMS due to creep, plasticity and processing-microstructures-temperatures related mechanisms
Date
| dc.contributor.author | Modlinski, Robert | |
| dc.contributor.thesisadvisor | Puers, Bob | |
| dc.contributor.thesisadvisor | Mertens, Robert | |
| dc.date.accessioned | 2021-10-19T16:26:38Z | |
| dc.date.available | 2021-10-19T16:26:38Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2011-01 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19443 | |
| dc.title | Creep in MEMS. Failures in MEMS due to creep, plasticity and processing-microstructures-temperatures related mechanisms | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |