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Fabrication of photonic components by nanoimprint technology within ePIXnet
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Fabrication of photonic components by nanoimprint technology within ePIXnet
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Date
2008
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17525.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Plachetka, U.
;
Kristensen, A.
;
Scheerlinck, Stijn
;
Huskens, J.
;
Koo, N.
;
Kurz, H.
Journal
Microelectronic Engineering
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1962
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations
Metrics
Views
1962
since deposited on 2021-10-17
Acq. date: 2025-12-11
Citations