Publication:

Fabrication of photonic components by nanoimprint technology within ePIXnet

Date

2008
Journal article
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dc.contributor.authorPlachetka, U.
dc.contributor.authorKristensen, A.
dc.contributor.authorScheerlinck, Stijn
dc.contributor.authorHuskens, J.
dc.contributor.authorKoo, N.
dc.contributor.authorKurz, H.
dc.date.accessioned2021-10-17T09:52:18Z
dc.date.available2021-10-17T09:52:18Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14319
dc.source.beginpage886
dc.source.endpage889
dc.source.journalMicroelectronic Engineering
dc.source.volume85
dc.title

Fabrication of photonic components by nanoimprint technology within ePIXnet

dc.typeJournal article
dspace.entity.typePublication
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