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Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument
Publication:
Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument
Date
2019
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Franquet, Alexis
;
Spampinato, Valentina
;
Kayser, Sven
;
Vandervorst, Wilfried
;
van der Heide, Paul
Journal
Abstract
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1949
since deposited on 2021-10-27
Acq. date: 2025-10-27
Citations
Metrics
Views
1949
since deposited on 2021-10-27
Acq. date: 2025-10-27
Citations