Publication:
Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument
Date
| dc.contributor.author | Franquet, Alexis | |
| dc.contributor.author | Spampinato, Valentina | |
| dc.contributor.author | Kayser, Sven | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | van der Heide, Paul | |
| dc.contributor.imecauthor | Franquet, Alexis | |
| dc.contributor.imecauthor | Spampinato, Valentina | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | van der Heide, Paul | |
| dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
| dc.contributor.orcidimec | Spampinato, Valentina::0000-0003-3225-6740 | |
| dc.contributor.orcidimec | van der Heide, Paul::0000-0001-6292-0329 | |
| dc.date.accessioned | 2021-10-27T09:20:43Z | |
| dc.date.available | 2021-10-27T09:20:43Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/32984 | |
| dc.source.conference | French users meeting ToF-SIMS | |
| dc.source.conferencedate | 14/03/2019 | |
| dc.source.conferencelocation | Bordeaux France | |
| dc.title | Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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