Effect of porogen residue on chemical, optical, and mechanical properties of CVD SiCOH low-k materials

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Author(s)

Urbanowicz, Adam

;

Vanstreels, Kris

;

Shamiryan, Denis

;

De Gendt, Stefan

;

Baklanov, Mikhaïl

Journal

Electrochemical and Solid-State Letters

Metrics

1921 since deposited on 2021-10-18

Acq. date: 2025-10-23