Publication:
Effect of porogen residue on chemical, optical, and mechanical properties of CVD SiCOH low-k materials
Date
| dc.contributor.author | Urbanowicz, Adam | |
| dc.contributor.author | Vanstreels, Kris | |
| dc.contributor.author | Shamiryan, Denis | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.imecauthor | Vanstreels, Kris | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2021-10-18T03:49:31Z | |
| dc.date.available | 2021-10-18T03:49:31Z | |
| dc.date.issued | 2009 | |
| dc.identifier.issn | 1099-0062 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16337 | |
| dc.source.beginpage | H292 | |
| dc.source.endpage | H295 | |
| dc.source.issue | 8 | |
| dc.source.journal | Electrochemical and Solid-State Letters | |
| dc.source.volume | 12 | |
| dc.title | Effect of porogen residue on chemical, optical, and mechanical properties of CVD SiCOH low-k materials | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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