Publication:

ALD HfO2 surface preparation study

Date

2003

Proceedings Paper

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Files

7229.pdf 402.17 KB

Author(s)

Delabie, Annelies

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;

;

Bajolet, Philippe

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;

Cartier, Eduard

;

Conard, Thierry

;

De Gendt, Stefan

;

Richard, Olivier

;

Vandervorst, Wilfried

;

;

;

;

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