Publication:

On the impact of mechanical stress on gate oxide trapping

Date

2020
Proceedings Paper
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dc.contributor.authorGoes, W.
dc.contributor.authorGrasser, T.
dc.contributor.authorKruv, Anastasiia
dc.contributor.authorKaczer, Ben
dc.contributor.authorGrill, Alexander
dc.contributor.authorGonzalez, Mario
dc.contributor.authorFranco, Jacopo
dc.contributor.authorLinten, Dimitri
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorKruv, A.
dc.contributor.imecauthorKaczer, B.
dc.contributor.imecauthorGrill, A.
dc.contributor.imecauthorGonzalez, M.
dc.contributor.imecauthorFranco, J.
dc.contributor.imecauthorLinten, D.
dc.contributor.imecauthorDe Wolf, I
dc.contributor.imecauthorKruv, Anastasiia
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorGrill, Alexander
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecGrill, Alexander::0000-0003-1615-1033
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-11-22T09:07:38Z
dc.date.available2021-11-02T16:05:40Z
dc.date.available2021-11-22T09:07:38Z
dc.date.issued2020
dc.identifier.eisbn978-1-7281-3199-3
dc.identifier.issn1541-7026
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38217
dc.publisherIEEE
dc.source.conferenceIEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedateAPR 28-MAY 30, 2020
dc.source.conferencelocationDallas, TX, USA
dc.source.journalna
dc.source.numberofpages5
dc.subject.keywordsCIRCUIT
dc.title

On the impact of mechanical stress on gate oxide trapping

dc.typeProceedings paper
dspace.entity.typePublication
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