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Conference contributions
Evaluation of barrier integrity on ultra low-k films with different porosities
Publication:
Evaluation of barrier integrity on ultra low-k films with different porosities
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Date
2013
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wang, Cong
;
Van Besien, Els
;
Baklanov, Mikhaïl
;
Verdonck, Patrick
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1861
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Acq. date: 2025-12-11
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Views
1861
since deposited on 2021-10-21
2
last month
Acq. date: 2025-12-11
Citations