Publication:
Manufacturability issues with double patterning for 50-nm half-pitch single damascene applications, using RELACS shrink and corresponding OPC
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1912 since deposited on 2021-10-16
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Acq. date: 2026-02-24
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Statistics
Views
1912 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-02-24
Citations