Publication:
Equivalent circuit fitting method for microwave characterisation of low-k dielectric thin films
| dc.contributor.author | Guerenneur, Anais | |
| dc.contributor.author | Kouznetsov, Dmitry | |
| dc.contributor.author | Narducci, Daniele | |
| dc.contributor.author | Luciano, Federica | |
| dc.contributor.author | Sun, Xiao | |
| dc.contributor.author | Van Dorpe, Pol | |
| dc.contributor.author | Ciubotaru, Florin | |
| dc.contributor.author | Adelmann, Christoph | |
| dc.contributor.imecauthor | Guerenneur, Anais | |
| dc.contributor.imecauthor | Kouznetsov, Dmitry | |
| dc.contributor.imecauthor | Narducci, Daniele | |
| dc.contributor.imecauthor | Luciano, Federica | |
| dc.contributor.imecauthor | Sun, Xiao | |
| dc.contributor.imecauthor | Van Dorpe, Pol | |
| dc.contributor.imecauthor | Ciubotaru, Florin | |
| dc.contributor.imecauthor | Adelmann, Christoph | |
| dc.contributor.orcidimec | Guerenneur, Anais::0000-0002-0357-3619 | |
| dc.contributor.orcidimec | Kouznetsov, Dmitry::0000-0001-8440-742X | |
| dc.contributor.orcidimec | Narducci, Daniele::0000-0003-3432-9149 | |
| dc.contributor.orcidimec | Luciano, Federica::0000-0001-7616-1810 | |
| dc.contributor.orcidimec | Sun, Xiao::0000-0002-2468-8933 | |
| dc.contributor.orcidimec | Van Dorpe, Pol::0000-0003-0918-1664 | |
| dc.contributor.orcidimec | Ciubotaru, Florin::0000-0002-7088-2075 | |
| dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
| dc.date.accessioned | 2024-11-18T13:14:10Z | |
| dc.date.available | 2024-08-08T19:57:45Z | |
| dc.date.available | 2024-11-18T13:14:10Z | |
| dc.date.issued | 2024 | |
| dc.description.wosFundingText | This work has been supported by imec's industrial affiliate program on beyond CMOS logic. The work of A G was supported by the FWO Vlaanderen PhD scholarship 1S97822N and the work of D K, D N, and F L by FWO Vlaanderen PhD scholarships 1SC0321N, 1SB9121N, 1183722N respectively. The authors would like to thank the imec lab facilities as well as the RF DSP lab for experimental support. | |
| dc.identifier.doi | 10.1088/1361-6501/ad6342 | |
| dc.identifier.issn | 0957-0233 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44281 | |
| dc.publisher | IOP Publishing Ltd | |
| dc.source.beginpage | Art. 105602 | |
| dc.source.endpage | N/A | |
| dc.source.issue | 10 | |
| dc.source.journal | MEASUREMENT SCIENCE AND TECHNOLOGY | |
| dc.source.numberofpages | 11 | |
| dc.source.volume | 35 | |
| dc.subject.keywords | RF | |
| dc.subject.keywords | PERMITTIVITY | |
| dc.subject.keywords | CAPACITANCE | |
| dc.title | Equivalent circuit fitting method for microwave characterisation of low-k dielectric thin films | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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