Publication:

Electrical demonstration of thermally stable Ni silicides on Si1-xCx epitaxial layers

Date

2010
Journal article
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Author(s)

Machkaoutsan, Vladimir  
;
Verheyen, Peter  
;
Bauer, M.
;
Zhang, Y.
;
Koelling, Sebastian
;
Franquet, Alexis  
;
Vanormelingen, Koen
;
Loo, Roger  
;
Kim, C.S.
;
Lauwers, Anne  
;
Horiguchi, Naoto  
;
Kerner, Christoph  
;
Hoffmann, Thomas
;
Granneman, E.
;
Vandervorst, Wilfried  
;
Absil, Philippe  
;
Thomas, S.G.

Journal

Microelectronic Engineering

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