Publication:
HfO2, Al2O3 and HfAlOx high-k dielectrics characterized by VUV spectroscopic ellipsometry
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1949 since deposited on 2021-10-15
Acq. date: 2025-12-15
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Views
1949 since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations