Active area patterning for CFET - Nanosheet etch

Brissonneau, Vincent; Koo, Il Gyo; Hosseini, Maryam; Batuk, Dmitry; Veloso, Anabela; Mannaert, Geert; Lazzarino, Frederic

doi:10.1117/12.3012322

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Active area patterning for CFET - Nanosheet etch

Date

2024

Proceedings Paper

https://doi.org/10.1117/12.3012322

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Proceedings of SPIE

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Active area patterning for CFET - Nanosheet etch

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