Publication:
Electrical performance comparison of embedded Si1-xGex source/drain junctions processed in 200 mm and 300 mmEpi-reactors
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1953 since deposited on 2021-10-17
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Acq. date: 2026-02-25
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1953 since deposited on 2021-10-17
2last month
2last week
Acq. date: 2026-02-25
Citations