Publication:
Electrical performance comparison of embedded Si1-xGex source/drain junctions processed in 200 mm and 300 mmEpi-reactors
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1951 since deposited on 2021-10-17
3last month
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Acq. date: 2026-01-26
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Statistics
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1951 since deposited on 2021-10-17
3last month
1last week
Acq. date: 2026-01-26
Citations