Publication:
Crystallization and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin films
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1995 since deposited on 2021-10-14
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Acq. date: 2025-12-09
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1995 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2025-12-09
Citations