Publication:
Crystallization and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin films
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1996 since deposited on 2021-10-14
1last month
Acq. date: 2026-03-17
Citations
Statistics
Views
1996 since deposited on 2021-10-14
1last month
Acq. date: 2026-03-17
Citations