Publication:
Crystallization and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin films
Date
| dc.contributor.author | Zhao, Chao | |
| dc.contributor.author | Roebben, G. | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.author | Van der Biest, O. | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.date.accessioned | 2021-10-14T18:33:13Z | |
| dc.date.available | 2021-10-14T18:33:13Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5879 | |
| dc.source.conference | 7th European Ceramic Society; 9-13 September 2001; Brugge, Belgium. | |
| dc.source.conferencelocation | ||
| dc.title | Crystallization and tetragonal-monoclinic transformation in ZrO2 and HfO2 dielectric thin films | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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