Publication:

Highly doped low-temperature Si:P growth for source/drain formation in advanced Si nFETs

Date

2017

Meeting abstract

Simple item page Full metadata Statistics

Author(s)

;

;

Hikavyy, Andriy

;

Porret, Clément

;

;

;

Vandooren, Anne

;

Veloso, Anabela

;

Collaert, Nadine

;

;

Statistics

1965 since deposited on 2021-10-24

1last month

1last week

Acq. date: 2026-01-26