Publication:

Quantitative depth profiling of SiGe-multilayers with the atomprobe

Date

2009

Meeting abstract

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Files

19078.pdf 16.22 KB

Author(s)

Koelling, Sebastian

;

Gilbert, Matthieu

;

Vandervorst, Wilfried

Statistics

1859 since deposited on 2021-10-17

Acq. date: 2026-02-26