Publication:

Quantitative depth profiling of SiGe-multilayers with the atomprobe

Date

2009
Meeting abstract
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dc.contributor.authorKoelling, Sebastian
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-17T23:33:40Z
dc.date.available2021-10-17T23:33:40Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15617
dc.source.conferenceSIMS XVII
dc.source.conferencedate14/09/2009
dc.source.conferencelocationToronto Canada
dc.title

Quantitative depth profiling of SiGe-multilayers with the atomprobe

dc.typeMeeting abstract
dspace.entity.typePublication
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