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Growth inhibition of metal oxide ALD on advanced patterning film (APF) for tone reversal of HfO2 and TiO2 patterned structures
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2013 since deposited on 2021-10-24
Acq. date: 2026-02-27
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Statistics
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2013 since deposited on 2021-10-24
Acq. date: 2026-02-27
Citations