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Study of copper drift during TDDB of intermetal dielectrics by using fully passivated MOS capacitors as test vehicle
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1 since deposited on 2021-10-17
Acq. date: 2026-04-26
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1830 since deposited on 2021-10-17
Acq. date: 2026-04-26
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Downloads
1 since deposited on 2021-10-17
Acq. date: 2026-04-26
Views
1830 since deposited on 2021-10-17
Acq. date: 2026-04-26
Citations