Publication:
A comparison of positive- and negative tone contact hole process flows using the IMEC NXE 3100
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1902 since deposited on 2021-10-20
3last month
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Acq. date: 2026-01-26
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Statistics
Views
1902 since deposited on 2021-10-20
3last month
1last week
Acq. date: 2026-01-26
Citations