Publication:
The spacer/replacer concept: a viable route for sub-100 nm ultrathin-film fully-depleted SOI CMOS
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1819 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-15
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Views
1819 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-15
Citations