Publication:
The spacer/replacer concept: a viable route for sub-100 nm ultrathin-film fully-depleted SOI CMOS
Date
| dc.contributor.author | van Meer, Hans | |
| dc.contributor.author | De Meyer, Kristin | |
| dc.contributor.imecauthor | De Meyer, Kristin | |
| dc.date.accessioned | 2021-10-14T23:38:03Z | |
| dc.date.available | 2021-10-14T23:38:03Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6953 | |
| dc.source.beginpage | 46 | |
| dc.source.endpage | 48 | |
| dc.source.issue | 1 | |
| dc.source.journal | IEEE Electron Device Letters | |
| dc.source.volume | 23 | |
| dc.title | The spacer/replacer concept: a viable route for sub-100 nm ultrathin-film fully-depleted SOI CMOS | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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