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Combined IV and CV analysis of laser annealed carbon and boron implanted SiGe epitaxial layers
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Combined IV and CV analysis of laser annealed carbon and boron implanted SiGe epitaxial layers
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Date
2010
Proceedings Paper
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21499.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kobayashi, Daisuke
;
Bargallo Gonzalez, Mireia
;
Rosseel, Erik
;
Hikavyy, Andriy
;
Hirose, K.
;
Simoen, Eddy
;
Claeys, Cor
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Acq. date: 2025-12-10
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since deposited on 2021-10-18
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Acq. date: 2025-12-10
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Downloads
1
since deposited on 2021-10-18
Acq. date: 2025-12-10
Views
1887
since deposited on 2021-10-18
2
last month
Acq. date: 2025-12-10
Citations