Publication:

Characterization of a FinFET 6T-SRAM cell by tomography

Date

2009
Meeting abstract
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dc.contributor.authorRichard, Olivier
dc.contributor.authorDemuynck, Steven
dc.contributor.authorVeloso, Anabela
dc.contributor.authorVan Marcke, Patricia
dc.contributor.authorBender, Hugo
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorVan Marcke, Patricia
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.accessioned2021-10-18T02:15:41Z
dc.date.available2021-10-18T02:15:41Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16104
dc.source.conferenceMicroscopy of Semiconducting Materials XVI
dc.source.conferencedate17/03/2009
dc.source.conferencelocationOxford UK
dc.title

Characterization of a FinFET 6T-SRAM cell by tomography

dc.typeMeeting abstract
dspace.entity.typePublication
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