Publication:
Challenges on surface conditioning in 3D device architectures: triple-gate finFETs, gate-all-around lateral and vertical nanowireFETs
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1980 since deposited on 2021-10-24
2last month
Acq. date: 2026-02-24
Citations
Statistics
Views
1980 since deposited on 2021-10-24
2last month
Acq. date: 2026-02-24
Citations