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Challenges on surface conditioning in 3D device architectures: triple-gate finFETs, gate-all-around lateral and vertical nanowireFETs
Publication:
Challenges on surface conditioning in 3D device architectures: triple-gate finFETs, gate-all-around lateral and vertical nanowireFETs
Date
2017
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Veloso, Anabela
;
Paraschiv, Vasile
;
Vecchio, Emma
;
Devriendt, Katia
;
Li, Waikin
;
Simoen, Eddy
;
Chan, BT
;
Tao, Zheng
;
Rosseel, Erik
;
Loo, Roger
;
Milenin, Alexey
;
Kunert, Bernardette
;
Teugels, Lieve
;
Sebaai, Farid
;
Lorant, Christophe
;
van Dorp, Dennis
;
Altamirano Sanchez, Efrain
;
Brus, Stephan
;
Marien, Philippe
;
Sibaja-Hernandez, Arturo
;
Matagne, Philippe
;
Waldron, Niamh
;
Mocuta, Dan
;
Collaert, Nadine
Journal
Abstract
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1971
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations
Metrics
Views
1971
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations