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Challenges on surface conditioning in 3D device architectures: triple-gate finFETs, gate-all-around lateral and vertical nanowireFETs
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1974 since deposited on 2021-10-24
1last month
Acq. date: 2025-12-08
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Metrics
Views
1974 since deposited on 2021-10-24
1last month
Acq. date: 2025-12-08
Citations