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Articles
Diffusion barrier integrity evaluation by ellipsometric ellipsometry
Publication:
Diffusion barrier integrity evaluation by ellipsometric ellipsometry
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Date
2003
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Shamiryan, Denis
;
Baklanov, Mikhaïl
;
Maex, Karen
Journal
Journal of Vacuum Science & Technology B
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1793
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations
Metrics
Views
1793
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations