Publication:
Diffusion barrier integrity evaluation by ellipsometric ellipsometry
Date
| dc.contributor.author | Shamiryan, Denis | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T06:36:39Z | |
| dc.date.available | 2021-10-15T06:36:39Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8129 | |
| dc.source.beginpage | 220 | |
| dc.source.endpage | 223 | |
| dc.source.issue | 1 | |
| dc.source.journal | Journal of Vacuum Science & Technology B | |
| dc.source.volume | 21 | |
| dc.title | Diffusion barrier integrity evaluation by ellipsometric ellipsometry | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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