Publication:

Analysis of advanced technology nodes and h-NA EUV introduction: a cost perspective

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2600804

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Author(s)

Mirabelli, Gioele

;

;

Trivkovic, Darko

;

;

Spessot, Alessio

;

;

Kim, Ryan Ryoung han

;

Hellings, Geert

;

Ryckaert, Julien

Journal

SPIE Proceedings; Volume 11854,

Metrics

1679 since deposited on 2022-05-22

Acq. date: 2025-12-11