Publication:
Towards the integration of In53Ga47As on 300 mm Si for CMOS sub 7 nm node: development of thin graded InGaAs buffers
Date
| dc.contributor.author | Mols, Yves | |
| dc.contributor.author | Kunert, Bernardette | |
| dc.contributor.author | Gaudin, Gweltaz | |
| dc.contributor.author | Langer, Robert | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.imecauthor | Mols, Yves | |
| dc.contributor.imecauthor | Kunert, Bernardette | |
| dc.contributor.imecauthor | Langer, Robert | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.orcidimec | Kunert, Bernardette::0000-0002-8986-4109 | |
| dc.contributor.orcidimec | Langer, Robert::0000-0002-1132-3468 | |
| dc.date.accessioned | 2021-10-22T21:12:24Z | |
| dc.date.available | 2021-10-22T21:12:24Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25663 | |
| dc.source.conference | 20th American Conf on Crystal Growth and Epitaxy - ACCGE-20 and 17th Biennial Ws on Organometallic Vapor Phase Epitaxy- OMVPE-17 | |
| dc.source.conferencedate | 2/08/2015 | |
| dc.source.conferencelocation | Big Sky, MT USA | |
| dc.title | Towards the integration of In53Ga47As on 300 mm Si for CMOS sub 7 nm node: development of thin graded InGaAs buffers | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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