Publication:

Area-Selective Deposition of AlOx and Al-Silicate for Fully Self- Aligned Via Integration

Date

2023
Journal article
https://doi.org/10.1021/acsami.2c18014
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 5.1 MB

Author(s)

Pasquali, Mattia  
;
Brady-Boyd, Anita  
;
Lesniewska, Alicja  
;
Carolan, Patrick  
;
Conard, Thierry  
;
O'Connor, Robert
;
De Gendt, Stefan  
;
Armini, Silvia  

Journal

ACS APPLIED MATERIALS & INTERFACES

Abstract

Description

Statistics

Downloads

4 since deposited on 2023-02-19
Acq. date: 2026-01-25

Views

1237 since deposited on 2023-02-19
Acq. date: 2026-01-25

Citations

Statistics

Downloads

4 since deposited on 2023-02-19
Acq. date: 2026-01-25

Views

1237 since deposited on 2023-02-19
Acq. date: 2026-01-25

Citations