Publication:

Atomic layer deposition of scandium-based oxides

Date

2013
Meeting abstract
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Author(s)

Nyns, Laura  
;
Lisoni, Judit
;
Van den Bosch, Geert  
;
Van Elshocht, Sven  
;
Van Houdt, Jan  

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1917 since deposited on 2021-10-21
Acq. date: 2026-02-24

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