Publication:
Atomic layer deposition of scandium-based oxides
Date
| dc.contributor.author | Nyns, Laura | |
| dc.contributor.author | Lisoni, Judit | |
| dc.contributor.author | Van den Bosch, Geert | |
| dc.contributor.author | Van Elshocht, Sven | |
| dc.contributor.author | Van Houdt, Jan | |
| dc.contributor.imecauthor | Nyns, Laura | |
| dc.contributor.imecauthor | Van den Bosch, Geert | |
| dc.contributor.imecauthor | Van Elshocht, Sven | |
| dc.contributor.imecauthor | Van Houdt, Jan | |
| dc.contributor.orcidimec | Nyns, Laura::0000-0001-8220-870X | |
| dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
| dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
| dc.contributor.orcidimec | Van Houdt, Jan::0000-0003-1381-6925 | |
| dc.date.accessioned | 2021-10-21T10:31:06Z | |
| dc.date.available | 2021-10-21T10:31:06Z | |
| dc.date.issued | 2013 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/22872 | |
| dc.identifier.url | http://www.emrs-strasbourg.com/index.php?option=com_abstract&task=view&id=209&day=2013-05-28&year=2013&Itemid=99999999&id_season | |
| dc.source.beginpage | N.IV 4 | |
| dc.source.conference | E-MRS 2013 Spring Meeting | |
| dc.source.conferencedate | 27/05/2013 | |
| dc.source.conferencelocation | Strasbourg France | |
| dc.title | Atomic layer deposition of scandium-based oxides | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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