Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Development of an all-in one wet single wafer process for 3D-SIC bump integration and its monitoring
Publication:
Development of an all-in one wet single wafer process for 3D-SIC bump integration and its monitoring
Date
2016
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
34805.pdf
461.26 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Suhard, Samuel
;
Iwasaki, Akihisa
;
Liebens, Maarten
;
Stiers, Karen
;
Slabbekoorn, John
;
Holsteyns, Frank
Journal
Abstract
Description
Metrics
Views
1892
since deposited on 2021-10-23
424
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1892
since deposited on 2021-10-23
424
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations