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Charge trapping, mobility degradation and reliability of high-e gate stacks

Date

2002
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dc.contributor.authorCartier, Eduard
dc.contributor.authorKerber, Andreas
dc.contributor.authorPantisano, Luigi
dc.contributor.authorCarter, Richard
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorDegraeve, Robin
dc.contributor.imecauthorDegraeve, Robin
dc.date.accessioned2021-10-14T21:12:37Z
dc.date.available2021-10-14T21:12:37Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6084
dc.source.conference33rd IEEE Semiconductor Interface Specialists Conference - SISC
dc.source.conferencedate5/12/2002
dc.source.conferencelocationSan Diego, CA USA
dc.title

Charge trapping, mobility degradation and reliability of high-e gate stacks

dc.typeOral presentation
dspace.entity.typePublication
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