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Conference contributions
Silicide and shallow trench isolation line width dependent stress induced junction leakage
Publication:
Silicide and shallow trench isolation line width dependent stress induced junction leakage
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Date
2000
Proceedings Paper
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4771.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Steegen, An
;
Lauwers, Anne
;
de Potter de ten Broeck, Muriel
;
Badenes, Gonçal
;
Rooyackers, Rita
;
Maex, Karen
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1850
since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations
Metrics
Views
1850
since deposited on 2021-10-14
Acq. date: 2025-12-15
Citations