Publication:

Thin L-shaped spacers for CMOS devices

Date

2003

Proceedings Paper

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Author(s)

Augendre, Emmanuel

;

Rooyackers, Rita

;

de Potter de ten Broeck, Muriel

;

;

;

Mannaert, Geert

;

Vrancken, Christa

;

Vassilev, Vesselin

;

Chiarella, Thomas

;

;

Debusschere, Ingrid

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Acq. date: 2026-08-05