Publication:

Thin L-shaped spacers for CMOS devices

Date

2003-09
Proceedings Paper
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dc.contributor.authorAugendre, Emmanuel
dc.contributor.authorRooyackers, Rita
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorKunnen, Eddy
dc.contributor.authorBeckx, Stephan
dc.contributor.authorMannaert, Geert
dc.contributor.authorVrancken, Christa
dc.contributor.authorVassilev, Vesselin
dc.contributor.authorChiarella, Thomas
dc.contributor.authorJurczak, Gosia
dc.contributor.authorDebusschere, Ingrid
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.date.accessioned2021-10-15T03:59:22Z
dc.date.available2021-10-15T03:59:22Z
dc.date.issued2003-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7159
dc.source.beginpage219
dc.source.conference33rd European Solid-State Devices Research Conference - ESSDERC
dc.source.conferencedate16/09/2003
dc.source.conferencelocationEstoril Portugal
dc.source.endpage222
dc.title

Thin L-shaped spacers for CMOS devices

dc.typeProceedings paper
dspace.entity.typePublication
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