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Plasma hydrogenation of strain-relaxed SiGe/Si heterostructure for layer transfer
Publication:
Plasma hydrogenation of strain-relaxed SiGe/Si heterostructure for layer transfer
Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Chen, Peng
;
Chu, Paul K.
;
Höchbauer, T.
;
Nastasi, M.
;
Buca, D.
;
Mantl, S.
;
Theodore, N. David
;
Alford, T.L.
;
Mayer, J. W.
;
Loo, Roger
;
Caymax, Matty
;
Cai, M.
;
Lau, S.
Journal
Applied Physics Letters
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1963
since deposited on 2021-10-15
Acq. date: 2025-10-24
Citations
Metrics
Views
1963
since deposited on 2021-10-15
Acq. date: 2025-10-24
Citations