Publication:
Plasma hydrogenation of strain-relaxed SiGe/Si heterostructure for layer transfer
Date
| dc.contributor.author | Chen, Peng | |
| dc.contributor.author | Chu, Paul K. | |
| dc.contributor.author | Höchbauer, T. | |
| dc.contributor.author | Nastasi, M. | |
| dc.contributor.author | Buca, D. | |
| dc.contributor.author | Mantl, S. | |
| dc.contributor.author | Theodore, N. David | |
| dc.contributor.author | Alford, T.L. | |
| dc.contributor.author | Mayer, J. W. | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Cai, M. | |
| dc.contributor.author | Lau, S. | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-15T12:51:12Z | |
| dc.date.available | 2021-10-15T12:51:12Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8673 | |
| dc.source.beginpage | 4944 | |
| dc.source.endpage | 4946 | |
| dc.source.issue | 21 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 85 | |
| dc.title | Plasma hydrogenation of strain-relaxed SiGe/Si heterostructure for layer transfer | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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