A 200 mm Wafer-Scale Al2O3 Photonics Waveguide Technology for UV and Visible Applications

Neutens, P.; Mafakheri, E.; Zheng, X.; Helin, P.; Jafari, Z.; Lin, C.; Jeevanandam, G.; Pham, Nga P.; Fan, S.; Su, C.; Jansen, R.; Van Dorpe, P.; Le Thomas, N.; Haffner, C.

doi:10.1109/JPHOT.2025.3568162

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A 200 mm Wafer-Scale Al2O3 Photonics Waveguide Technology for UV and Visible Applications

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2025-JUN

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https://doi.org/10.1109/JPHOT.2025.3568162

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IEEE PHOTONICS JOURNAL

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105 since deposited on 2025-05-26

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Acq. date: 2026-01-06

A 200 mm Wafer-Scale Al<sub>2</sub>O<sub>3</sub> Photonics Waveguide Technology for UV and Visible Applications

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