Publication:

A 200 mm Wafer-Scale Al<sub>2</sub>O<sub>3</sub> Photonics Waveguide Technology for UV and Visible Applications

Date

2025-JUN
Journal article
https://doi.org/10.1109/JPHOT.2025.3568162
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dc.contributor.authorNeutens, P.
dc.contributor.authorMafakheri, E.
dc.contributor.authorZheng, X.
dc.contributor.authorHelin, P.
dc.contributor.authorJafari, Z.
dc.contributor.authorLin, C.
dc.contributor.authorJeevanandam, G.
dc.contributor.authorPham, Nga P.
dc.contributor.authorFan, S.
dc.contributor.authorSu, C.
dc.contributor.authorJansen, R.
dc.contributor.authorVan Dorpe, P.
dc.contributor.authorLe Thomas, N.
dc.contributor.authorHaffner, C.
dc.contributor.imecauthorNeutens, P.
dc.contributor.imecauthorMafakheri, E.
dc.contributor.imecauthorHelin, P.
dc.contributor.imecauthorJafari, Z.
dc.contributor.imecauthorJeevanandam, G.
dc.contributor.imecauthorPham, Nga P.
dc.contributor.imecauthorJansen, R.
dc.contributor.imecauthorVan Dorpe, P.
dc.contributor.imecauthorHaffner, C.
dc.date.accessioned2025-05-26T05:33:58Z
dc.date.available2025-05-26T05:33:58Z
dc.date.issued2025-JUN
dc.description.wosFundingTextThe work of E. Mafakheri was supported by the European Union HORIZON TMA MSCA Postdoctoral Fellowships-European Fellowships through the Marie Sklodowska-Curie Actions (MSCA) under Grant 101065967.
dc.identifier.doi10.1109/JPHOT.2025.3568162
dc.identifier.issn1943-0655
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45724
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.issue3
dc.source.journalIEEE PHOTONICS JOURNAL
dc.source.numberofpages6
dc.source.volume17
dc.subject.keywordsSILICON-NITRIDE
dc.subject.keywordsULTRAVIOLET
dc.title

A 200 mm Wafer-Scale Al2O3 Photonics Waveguide Technology for UV and Visible Applications

dc.typeJournal article
dspace.entity.typePublication
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