Publication:

A 200 mm Wafer-Scale Al2O3 Photonics Waveguide Technology for UV and Visible Applications

Date

2025-JUN
Journal article
https://doi.org/10.1109/JPHOT.2025.3568162
Simple item page Full metadata Statistics
 
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0009-0002-8620-273X
cris.virtual.orcid0000-0001-6685-4699
cris.virtual.orcid0000-0002-3443-1568
cris.virtual.orcid0000-0002-8947-5293
cris.virtual.orcid0000-0002-5637-6168
cris.virtual.orcid0000-0002-0620-0033
cris.virtual.orcid0000-0003-0918-1664
cris.virtual.orcid0000-0003-2822-8624
cris.virtual.orcid0000-0002-0567-5790
cris.virtualsource.departmentf77aef4e-d402-4d8b-b118-16aca5fae8ae
cris.virtualsource.department78abe9ad-0cd2-44dc-8753-68c30e2b65b6
cris.virtualsource.departmentacbdbd96-9c7b-4e8c-902a-297c2d931f4d
cris.virtualsource.departmentc04369a5-9d93-401b-9abb-e57aa57e53c3
cris.virtualsource.department9784330b-844c-4e71-a644-5c93563b84aa
cris.virtualsource.department52c7ccb8-4fc8-437c-a738-76761b8056e9
cris.virtualsource.department56a0c18a-b0a0-443c-9e3d-f66a1f9b0f30
cris.virtualsource.department17b862db-8d90-42d7-91e0-eec792f2156c
cris.virtualsource.department20d97c50-fd55-4449-89bc-73edff957be9
cris.virtualsource.orcidf77aef4e-d402-4d8b-b118-16aca5fae8ae
cris.virtualsource.orcid78abe9ad-0cd2-44dc-8753-68c30e2b65b6
cris.virtualsource.orcidacbdbd96-9c7b-4e8c-902a-297c2d931f4d
cris.virtualsource.orcidc04369a5-9d93-401b-9abb-e57aa57e53c3
cris.virtualsource.orcid9784330b-844c-4e71-a644-5c93563b84aa
cris.virtualsource.orcid52c7ccb8-4fc8-437c-a738-76761b8056e9
cris.virtualsource.orcid56a0c18a-b0a0-443c-9e3d-f66a1f9b0f30
cris.virtualsource.orcid17b862db-8d90-42d7-91e0-eec792f2156c
cris.virtualsource.orcid20d97c50-fd55-4449-89bc-73edff957be9
dc.contributor.authorNeutens, Pieter
dc.contributor.authorMafakheri, Erfan
dc.contributor.authorZheng, X.
dc.contributor.authorHelin, Philippe
dc.contributor.authorJafari, Zeinab
dc.contributor.authorLin, C.
dc.contributor.authorJeevanandam, Gaudhaman
dc.contributor.authorPham, Nga
dc.contributor.authorFan, S.
dc.contributor.authorSu, C.
dc.contributor.authorJansen, Roelof
dc.contributor.authorVan Dorpe, Pol
dc.contributor.authorLe Thomas, N.
dc.contributor.authorHaffner, Christian
dc.contributor.imecauthorNeutens, P.
dc.contributor.imecauthorMafakheri, E.
dc.contributor.imecauthorHelin, P.
dc.contributor.imecauthorJafari, Z.
dc.contributor.imecauthorJeevanandam, G.
dc.contributor.imecauthorPham, Nga P.
dc.contributor.imecauthorJansen, R.
dc.contributor.imecauthorVan Dorpe, P.
dc.contributor.imecauthorHaffner, C.
dc.date.accessioned2025-05-26T05:33:58Z
dc.date.available2025-05-26T05:33:58Z
dc.date.issued2025-JUN
dc.description.wosFundingTextThe work of E. Mafakheri was supported by the European Union HORIZON TMA MSCA Postdoctoral Fellowships-European Fellowships through the Marie Sklodowska-Curie Actions (MSCA) under Grant 101065967.
dc.identifier.doi10.1109/JPHOT.2025.3568162
dc.identifier.issn1943-0655
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45724
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage2200706
dc.source.issue3
dc.source.journalIEEE PHOTONICS JOURNAL
dc.source.numberofpages6
dc.source.volume17
dc.subject.keywordsSILICON-NITRIDE
dc.subject.keywordsULTRAVIOLET
dc.title

A 200 mm Wafer-Scale Al2O3 Photonics Waveguide Technology for UV and Visible Applications

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
A_200_mm_Wafer-Scale_Al2O3_Photonics_Waveguide_Technology_for_UV_and_Visible_Applications.pdf
Size:
2.17 MB
Format:
Adobe Portable Document Format
Description:
Published
Download
Publication available in collections:
Articles