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Charge instability of atomic-layer deposited TaSiOx insulators on Si, InP, and In0.53Ga0.47As
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Charge instability of atomic-layer deposited TaSiOx insulators on Si, InP, and In0.53Ga0.47As
Date
2012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Afanasiev, Valeri
;
Chou, H.Y.
;
Thoan, N.H.
;
Adelmann, Christoph
;
Lin, Dennis
;
Houssa, Michel
;
Stesmans, Andre
Journal
Applied Physics Letters
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1865
since deposited on 2021-10-20
1
last month
Acq. date: 2025-12-08
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Metrics
Views
1865
since deposited on 2021-10-20
1
last month
Acq. date: 2025-12-08
Citations