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Grown-in and process-induced defect control in advanced Ge technologies

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dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-16T15:19:47Z
dc.date.available2021-10-16T15:19:47Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11877
dc.source.conferenceWINNACT-12 Colloquium
dc.source.conferencedate6/06/2007
dc.source.conferencelocationKumming China
dc.title

Grown-in and process-induced defect control in advanced Ge technologies

dc.typeOral presentation
dspace.entity.typePublication
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