Publication:
Optical constants for EUV scatterometry
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-2959-432X | |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-5956-6485 | |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
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| cris.virtualsource.department | c1bbf7c6-fe00-4d3e-9b77-5ac76d18c50a | |
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| cris.virtualsource.orcid | 0ed0ad17-0b15-4c84-b55a-e2d02d830fa8 | |
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| cris.virtualsource.orcid | c1bbf7c6-fe00-4d3e-9b77-5ac76d18c50a | |
| cris.virtualsource.orcid | 1cd2c3e7-c1e1-49ae-a1b6-0f5584128e08 | |
| dc.contributor.author | Ciesielski, Richard | |
| dc.contributor.author | Saadeh, Qais | |
| dc.contributor.author | Naujok, Philipp | |
| dc.contributor.author | Opsomer, Karl | |
| dc.contributor.author | Soulie, Jean-Philippe | |
| dc.contributor.author | Wu, Meiyi | |
| dc.contributor.author | Philipsen, Vicky | |
| dc.contributor.author | Van de Kruijs, Robbert | |
| dc.contributor.author | Kolbe, Michael | |
| dc.contributor.author | Scholze, Frank | |
| dc.contributor.author | Soltwisch, Victor | |
| dc.contributor.imecauthor | Opsomer, Karl | |
| dc.contributor.imecauthor | Soulie, Jean-Philippe | |
| dc.contributor.imecauthor | Wu, Meiyi | |
| dc.contributor.imecauthor | Philipsen, Vicky | |
| dc.contributor.orcidimec | Soulie, Jean-Philippe::0000-0002-5956-6485 | |
| dc.contributor.orcidimec | Philipsen, Vicky::0000-0002-2959-432X | |
| dc.date.accessioned | 2021-10-31T08:13:56Z | |
| dc.date.available | 2021-10-31T08:13:56Z | |
| dc.date.issued | 2021 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/36574 | |
| dc.source.beginpage | 117830M | |
| dc.source.conference | Modeling Aspects in Optical Metrology VII | |
| dc.source.conferencedate | 21/06/2021 | |
| dc.source.conferencelocation | online online | |
| dc.title | Optical constants for EUV scatterometry | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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